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Driving a piezoelectric scanner
Trevor King
August 6, 2009

1 Why measure capacitance

Figure 1: Tube- and stack-type piezo scanners[1].
\includegraphics{mp/piezo.2} \includegraphics{mp/piezo.3}

A piezo tube scanner consists of a tube of piezoelectric material sandwiched between several electrodes (Fig. 1). With this configuration, the main issue in driving piezo movement is charging the capacitor.

The time constant $ \tau$ for charging a capacitor $ C$ in series with a resistor $ R$ is given by

$\displaystyle \tau = RC.$ (1)

The capacitance between parallel plates of area $ A$ separated by a distance $ d$ is given by

$\displaystyle C = \frac{\kappa \varepsilon A}{d},$ (2)

where $ \kappa$ is the dielectric constant of the material between the plates and $ \varepsilon$ is the permittivity of free space.

Because we expect small movements relative to the size of the piezo, we can expect that $ d$ remains relatively constant, so $ C$ will be roughly constant over our working range.

In order to estimate the charging time for an unstretched piezo, we need to measure the capacitance of the piezo scanner.

2 Measuring capacitance

As we do not seem to have a capacitance-measuring device in the lab, we will build one with our NI analog board[2].

2.1 False-starts

There are many complicated methods of accurately measuring impedance, but it seemed simple enough to just source an alternating current and measure the voltage induced over our piezo. For those whose E&M is rusty, the impedance of a capacitor $ X_C$ and inductor $ X_L$ are given by

$\displaystyle X_C$ $\displaystyle = \frac{1}{\omega C},$   and (3)
$\displaystyle X_L$ $\displaystyle = \omega L$ (4)

respectively, where $ \omega$ is the angular frequency.

I wrote a LabVIEW VI to measure capacitance by sourcing a driving current from our NI PCI-6052E board[2], but the sampling limit at 333kHz and the leakage capacitance and resistance of my voltage measuring leads limited the measurement to larger capacitances than I had available.

2.2 555 timer

I then wrote a LabVIEW VI to measure capacitance by watching the RC charging time for a capacitor and resistor in series, but again, the low impedance of the voltage-measuring leads limited the measurement to high capacitances.

I finally purchased some NE555N integrated circuits from Newark (SKU: 89K1486, $0.121), and following their suggested layout for monostable operation, generated a digital pulse with width $ 1.1\tau$ [3]. The high impedance of the 555 chip allowed the use of the larger resistors needed for smaller capacitors. Using meas_cap to generate the trigger pulse and measure the width of the resulting pulse, I finally got accurate measurements for my test capacitors. Using $ 50$ trials with a $ 1\U{M$\Omega$}$ resistor and a $ 100\U{kHz}$ sampling rate, I measured my calibration capacitors at

Rated (pF) Measured (pF) $ \pm$ (pF)
0 16.7 0.1
390 425.9 0.1
1000 1008.8 3.0
1390 1413.6 6.0
I imagine my ``$ 390\U{pF}$'' capacitor is actually around $ 415\U{pF}$, and my system is conservatively accurate to around 10%.


2.3 Capacitances of DI and Piezomechanik piezos

With the 555 timer setup, I measured the $ X$/$ Y$/$ Z$ capacitances for E- and J-type scanners, yielding the capacitances listed in Table 1. The capacitance of stack piezos is much, much larger than tube piezos.

The pinouts for a DI piezo module are as follows (piezo cable is female micro DB-9, labeled from upper right, 1 2 3 4 5 / 6 7 8 9)[4]:

DB-25 Line Piezo cable line Color Role
8 1 Black Ground
- 2 - Unused
- 3 - Unused
18 4 Orange (X+)
5 5 Yellow (X-)
22 6 ?Green? (Z+)
Jumper 7 7 ?Blue? Substrate voltage
20 8 Purple (Y+)
7 9 Grey (Y-)

The wiring for a Piezomechanik piezo are as follows[5]:

Line Color Role  
BNC shield Low voltage piezo contact  
BNC pin High voltage piezo contact  
Strain gauge Red    
Strain gauge Green    
Strain gauge Black    
Strain gauge White    


3 Charging a piezo

We need some estimate of $ R$ in order to calculate $ \tau$. $ R$ will either come from the internal impedance of our current source or from some external resistor to protect from excessive current. As a limiting case, the maximum rated current for the Nanoscope piezo control lines is $ 70\U{mA}$ and the maximum rated voltage is $ \pm 220\U{VDC}$ (Nanoscope IVa Controller Manual Rev. B, Chapter 10 ``Access to Intermediate NanoScope IVa Signals'', Table 10.2a ``Signal Access Module Connector Ratings''). As luck would have it, the maximum rated average current for our power supply is also $ I = 70\U{mA}$.

A maximum current of $ I = 70\U{mA}$ over a voltage range of $ V = \pm 220\U{VDC}$ yields a minimum resistance of $ R=V/I\sim6.3\U{k$\Omega$}$ to avoid over-current when jumping from one voltage rail to the other. With our Piezomechanic source, the voltage range is a unipolar $ V = 150\U{V}$, yielding a minimum resistance of $ R=V/I\sim2.1\U{k$\Omega$}$. However, since the $ \tau$s are less than $ 200\U{ms}$, we are within the range of the ``Current Booster'', so we can use $ I_B = 250\U{mA}$, yielding $ R_B = $ and $ \tau_B = $. We use the unboosted current over $ 150\U{V}$ to determine the Piezomechanic-sourced rail-to-rail $ \tau$s and velocities given in Table 1.

The J-type piezo is rated $ d_{33} = 12.5\U{nm/V}$, so it has a range of $ \Delta z = 440\U{V} \cdot d_{33} = 5.5\U{$\mu$m}$[6], giving a maximum pulling speed of $ v = \Delta z / \tau = 9\U{mm/s}$ (Huge!).

Our current high voltage supply (Piezomechanik GmbH LE 150/025) has the following characteristics[7]:

Input:  
Signal: $ \pm 5\U{V}$
Impedance: $ 5\U{k$\Omega$}$
Output:  
Voltage total: $ 0\U{V}$ thru $ +150\U{V}$
DC-Offset range: $ 0\U{V}$ thru $ +150\U{V}$
Gain: 30 (without attenuation)
Peak Current: $ 250\U{mA}$ (for $ 200\U{ms}$)
Average Current: $ 70\U{mA}$
Noise: $ 5\U{mVpp}$ (for $ 2.7\U{$\mu$F}$ load)
So we can certainly source enough current, and the internal output impedance seems to be in a safe range (no external resistor required). The ``Monitor'' output on the power supply mirrors the high-voltage output attenuated by a factor of 1000.


Table 1: Measured capacitances (Sec. 2.3) and charging characteristics (Sec. 3) for various piezos in our lab. Charging times are for a resistively protected Piezomechanik source rounded to two significant figures. The $ d_{33}$ values are the manufacturer's ratings.
Type Axis Capacitance (nF) $ \tau = R_$series$ C$ ($ \mu$s) $ d_{33}$ (nm/V) $ v_$max (m/s)
DI E X, Y 4.1 13    
DI E Z 33 100    
DI J X, Y 23 72    
DI J Z 53 170 12.5  
Piezomechanik (small?) Z 870 2700    
Piezomechanik (big?) Z 2,300 7200    


Bibliography

1
Physickinstrumente. Basic Designs of Piezoelectric Positioning Drives/Systems.
http://www.physikinstrumente.com/en/products/prdetail.php?sortnr=400800.00

2
National Instruments. PCI 6052E.
http://sine.ni.com/nips/cds/view/p/lang/en/nid/2601

3
Newark. NE555N.
http://www.newark.com/jsp/search/results.jsp?N=0&Ntk=gensearch_001&Ntt=ne555n&Ntx=&isGoback=false

4
King, W.T. Multimode internals.
http://www.physics.drexel.edu/~wking/rsrch/multimode/internals.shtml

5
Piezomechanik. Strain Gauge Amplifiers.
http://www.piezomechanik.com/en/home/products/index.html?category=49

6
Digital Instruments Sens (nm/V). Printed on piezo casing.

7
Piezomechanik. Electronic Supplies for Piezomechanics: Technical Data.
http://www.piezomechanik.com/en/home/products/index.html?category=49

About this document ...

This document was generated using the LaTeX2HTML translator Version 2002-2-1 (1.71)

Copyright © 1993, 1994, 1995, 1996, Nikos Drakos, Computer Based Learning Unit, University of Leeds.
Copyright © 1997, 1998, 1999, Ross Moore, Mathematics Department, Macquarie University, Sydney.

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latex2html -split 1 -white -notransparent -html_version 3.2 -t piezo_control -dir html -mkdir -noshort_extn -top_navigation -bottom_navigation -up_url ../ -up_title Papers -show_section_numbers -style '/%7Ewking/shared/style_l2h.css' main.tex

The translation was initiated by William Trevor King on 2009-08-06


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